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  "abstract": "A conveying apparatus for conveying a plate-shaped workpiece includes a holding unit that holds the plate-shaped workpiece under suction, a moving unit that moves in a vertical direction together with the holding unit, a detection unit that detects that the holding unit has moved downward and made contact with the plate-shaped workpiece, and a control unit that performs control to stop a downward movement of the moving unit when the detection unit detects that the holding unit has made contact with the plate-shaped workpiece.",
  "assignees": [
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    "HONOKI KOYO",
    "ITABASHI KOJI",
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  "title": "Conveying apparatus and peeling apparatus",
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