OPENTECHNICAL PUBLICATION
OT-2026-000001974

Substrate handling robot lifting arrangement and method thereof

Published: 2026-09-15T19:09:54.170105Z
Permanent URL: https://opentechnical.org/p/OT-2026-000001974
Categories: Lifting, Positioning & Manipulation > Hoists and Cranes

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ABSTRACT

A robot lifting arrangement is provided. The robot lifting arrangement
includes a robot lifting crane that is configured to lift a substrate handling
robot to an elevated position. The robot lifting arrangement also includes a
track section that may extend from a chamber on the platform to an external
area. Robot lifting crane may lift the robot from the chamber and transport it
along the track to the external area for repair/maintenance or lift the robot
from the external area and transport it along the track back to the chamber
for installation into the chamber.

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OpenTechnical publication OT-2026-000001974
Published 2026-09-15T19:09:54.170105Z
https://opentechnical.org/p/OT-2026-000001974