---
publication_id: "OT-2026-000002067"
title: "Substrate transfer apparatus using upper and lower magnetic levitation rails"
published_at: "2026-09-15T19:10:33.944674Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000002067"
categories:
  - "material-handling/conveying-systems"
keywords:
  - "b65g47/90"
  - "b65g54/02"
  - "b65g54/02"
  - "b65g47/90"
  - "b65g47/90"
  - "b65g47/90"
---

# Substrate transfer apparatus using upper and lower magnetic levitation rails

## Abstract

Disclosed is a substrate transfer apparatus including a moving plate including an upper magnetic levitation rail and a lower magnetic levitation rail, a processing chamber disposed adjacent to the moving plate and that processes a substrate, and a shuttle disposed between the upper magnetic levitation rail and the lower magnetic levitation rail, being moved on the moving plate, and that accommodates the substrate.