OPENTECHNICAL PUBLICATION
OT-2026-000002067

Substrate transfer apparatus using upper and lower magnetic levitation rails

Published: 2026-09-15T19:10:33.944674Z
Permanent URL: https://opentechnical.org/p/OT-2026-000002067
Categories: Material Handling > Conveying Systems

------------------------------------------------------------------------

ABSTRACT

Disclosed is a substrate transfer apparatus including a moving plate including
an upper magnetic levitation rail and a lower magnetic levitation rail, a
processing chamber disposed adjacent to the moving plate and that processes a
substrate, and a shuttle disposed between the upper magnetic levitation rail
and the lower magnetic levitation rail, being moved on the moving plate, and
that accommodates the substrate.

------------------------------------------------------------------------

OpenTechnical publication OT-2026-000002067
Published 2026-09-15T19:10:33.944674Z
https://opentechnical.org/p/OT-2026-000002067