---
publication_id: "OT-2026-000002359"
title: "Factory interface with redundancy"
published_at: "2026-09-15T19:12:29.187805Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000002359"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j21/005"
  - "b25j21/005"
  - "b25j21/005"
  - "h10p72/0451"
  - "b25j21/00"
  - "b25j21/005"
---

# Factory interface with redundancy

## Abstract

A substrate processing system for an electronic device manufacturing system can include a factory interface forming an interior volume, and a partition disposed in the factory interface. The partition can divide the interior volume into a first factory interface chamber forming a second interior volume, and a second factory interface chamber forming a third interior volume. The partition can be configured to provide a first sealed environment in the first factory interface chamber and a second sealed environment in the second factory interface chamber.