OPENTECHNICAL PUBLICATION
OT-2026-000002359

Factory interface with redundancy

Published: 2026-09-15T19:12:29.187805Z
Permanent URL: https://opentechnical.org/p/OT-2026-000002359
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A substrate processing system for an electronic device manufacturing system
can include a factory interface forming an interior volume, and a partition
disposed in the factory interface. The partition can divide the interior
volume into a first factory interface chamber forming a second interior
volume, and a second factory interface chamber forming a third interior
volume. The partition can be configured to provide a first sealed environment
in the first factory interface chamber and a second sealed environment in the
second factory interface chamber.

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OpenTechnical publication OT-2026-000002359
Published 2026-09-15T19:12:29.187805Z
https://opentechnical.org/p/OT-2026-000002359