{
  "abstract": "A dry substrate hand of the present invention includes a first branch blade, a pair of proximal end guides provided at a proximal end portion of the first branch blade and in contact with a substrate end portion, and a pair of distal end guides provided at a distal end portion of the first branch blade and in contact with the substrate end portion. The wet substrate hand of the present invention includes a second branch blade, a pair of proximal end protrusions provided at a proximal end portion of the second branch blade and in contact with a lower surface of a substrate to support the substrate, and a pair of distal end protrusions provided at a distal end portion of the second branch blade and in contact with the lower surface of the substrate to support the substrate.",
  "assignees": [
    "SCREEN HOLDINGS CO LTD"
  ],
  "authors": [
    "IWASAKI AKIHIRO"
  ],
  "canonical_url": "https://opentechnical.org/p/OT-2026-000002486",
  "categories": [
    "robotics-automation/robot-architectures"
  ],
  "extent": {
    "figures": 0,
    "paragraphs": 0,
    "words": 140
  },
  "figures": [],
  "files": [
    {
      "bytes": 10086,
      "media_type": "text/html; charset=utf-8",
      "name": "index.html",
      "sha256": "1888818761f3d750838d12549b60bf54d4a625c1c5ccf1000b7caa505acfd1dd"
    },
    {
      "bytes": 1362,
      "media_type": "text/markdown; charset=utf-8",
      "name": "publication.md",
      "sha256": "7d33e7f9211082d10fcad0dfb9c7eb5f4d36f3ab54d3b6d0759e5ca3e1f0e722"
    },
    {
      "bytes": 1389,
      "media_type": "text/plain; charset=utf-8",
      "name": "publication.txt",
      "sha256": "5e4ad927d93383684de73d9a5b9b7c483f51c2784b4c70f42bc1296c15872752"
    }
  ],
  "integrity": {
    "hash_algorithm": "sha256",
    "keys_url": "https://opentechnical.org/integrity/keys",
    "record_url": "https://opentechnical.org/p/OT-2026-000002486/integrity",
    "signature_algorithm": "Ed25519",
    "signature_file": "manifest.sig",
    "verify_url": "https://opentechnical.org/integrity/verify"
  },
  "keywords": [
    "b25j11/0095",
    "b25j15/0014",
    "b25j15/0014",
    "h10p72/3302",
    "b08b3/10",
    "b08b3/10"
  ],
  "language": "en",
  "license": {
    "name": "Creative Commons Attribution 4.0 International",
    "url": "https://creativecommons.org/licenses/by/4.0/"
  },
  "publication_id": "OT-2026-000002486",
  "published_at": "2026-09-15T19:13:23.665201Z",
  "publisher": "Nebula Innovations Limited",
  "record_type": "record",
  "schema": "opentechnical-publication-manifest/1.0",
  "source_date": "2026-02-26",
  "source_id": "US-2026054394-A1",
  "source_name": "the United States Patent and Trademark Office",
  "source_url": "https://patents.google.com/patent/US2026054394A1",
  "supersedes": null,
  "title": "Substrate transfer apparatus, and substrate processing system and substrate processing apparatus including the same",
  "uuid": "01a0a67c-fad0-769e-a96b-53d75ad9b9ff"
}