---
publication_id: "OT-2026-000002486"
title: "Substrate transfer apparatus, and substrate processing system and substrate processing apparatus including the same"
published_at: "2026-09-15T19:13:23.665201Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000002486"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j11/0095"
  - "b25j15/0014"
  - "b25j15/0014"
  - "h10p72/3302"
  - "b08b3/10"
  - "b08b3/10"
---

# Substrate transfer apparatus, and substrate processing system and substrate processing apparatus including the same

## Abstract

A dry substrate hand of the present invention includes a first branch blade, a pair of proximal end guides provided at a proximal end portion of the first branch blade and in contact with a substrate end portion, and a pair of distal end guides provided at a distal end portion of the first branch blade and in contact with the substrate end portion. The wet substrate hand of the present invention includes a second branch blade, a pair of proximal end protrusions provided at a proximal end portion of the second branch blade and in contact with a lower surface of a substrate to support the substrate, and a pair of distal end protrusions provided at a distal end portion of the second branch blade and in contact with the lower surface of the substrate to support the substrate.