OPENTECHNICAL PUBLICATION
OT-2026-000002486

Substrate transfer apparatus, and substrate processing system and substrate processing apparatus including the same

Published: 2026-09-15T19:13:23.665201Z
Permanent URL: https://opentechnical.org/p/OT-2026-000002486
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A dry substrate hand of the present invention includes a first branch blade, a
pair of proximal end guides provided at a proximal end portion of the first
branch blade and in contact with a substrate end portion, and a pair of distal
end guides provided at a distal end portion of the first branch blade and in
contact with the substrate end portion. The wet substrate hand of the present
invention includes a second branch blade, a pair of proximal end protrusions
provided at a proximal end portion of the second branch blade and in contact
with a lower surface of a substrate to support the substrate, and a pair of
distal end protrusions provided at a distal end portion of the second branch
blade and in contact with the lower surface of the substrate to support the
substrate.

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OpenTechnical publication OT-2026-000002486
Published 2026-09-15T19:13:23.665201Z
https://opentechnical.org/p/OT-2026-000002486