{
  "abstract": "An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.",
  "assignees": [
    "WATLOW ELECTRIC MFG"
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    "BALMA FRANK",
    "ELLIOT ALFRED GRANT",
    "ELLIOT BRENT DONALD ALFRED",
    "PARKER MICHAEL",
    "REX DENNIS GEORGE",
    "SCHUSTER RICHARD ERICH",
    "VEYTSER ALEXANDER"
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  "source_date": "2026-02-24",
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  "title": "Multi-layer ceramic plate device",
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