OPENTECHNICAL PUBLICATION
OT-2026-000002571

Multi-layer ceramic plate device

Published: 2026-09-15T19:13:55.417984Z
Permanent URL: https://opentechnical.org/p/OT-2026-000002571
Categories: Manufacturing & Assembly Equipment > Joining and Welding

------------------------------------------------------------------------

ABSTRACT

An electrostatic chuck includes a ceramic top plate layer made of a beryllium
oxide material, a ceramic bottom plate layer made of a beryllium oxide
material, a ceramic middle plate layer disposed between the ceramic top plate
layer and the ceramic bottom plate layer, an electrode layer disposed between
the ceramic top plate layer and the ceramic middle plate layer, and a heater
layer disposed between the ceramic middle plate layer and the ceramic bottom
plate layer. The electrode layer joins and hermetically seals the ceramic top
plate layer to the ceramic middle plate layer, and the heater layer joins and
hermetically seals the ceramic middle plate layer to the ceramic bottom plate
layer.

------------------------------------------------------------------------

OpenTechnical publication OT-2026-000002571
Published 2026-09-15T19:13:55.417984Z
https://opentechnical.org/p/OT-2026-000002571