{
  "abstract": "A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.",
  "assignees": [
    "APPLIED MATERIALS INC"
  ],
  "authors": [
    "BAJAJ GEETIKA",
    "DHAYALAN ARUN",
    "FENWICK DAVID",
    "GORADIA PRERNA",
    "HE XIAOMING",
    "HUDGENS JEFF",
    "MUTHUKAMATCHY KARUPPASAMY",
    "NATU GAYATRI",
    "SEPPAELAE SANNI",
    "SUN JENNIFER",
    "THAKARE DARSHAN",
    "THANU RAJKUMAR"
  ],
  "canonical_url": "https://opentechnical.org/p/OT-2026-000002620",
  "categories": [
    "robotics-automation/robot-architectures"
  ],
  "extent": {
    "figures": 0,
    "paragraphs": 0,
    "words": 58
  },
  "figures": [],
  "files": [
    {
      "bytes": 9745,
      "media_type": "text/html; charset=utf-8",
      "name": "index.html",
      "sha256": "f33394ba3738a5dfe615e2283f4b2433fabc318527f9e673129a1e6f4b232298"
    },
    {
      "bytes": 911,
      "media_type": "text/markdown; charset=utf-8",
      "name": "publication.md",
      "sha256": "8be3a989ae2d981cf898d19f1a1cad1043fe490a541e215837a504d90af20a35"
    },
    {
      "bytes": 959,
      "media_type": "text/plain; charset=utf-8",
      "name": "publication.txt",
      "sha256": "1974384afd4db2847d2ab064c730141b803122f966d036500002a1a77bc603f0"
    }
  ],
  "integrity": {
    "hash_algorithm": "sha256",
    "keys_url": "https://opentechnical.org/integrity/keys",
    "record_url": "https://opentechnical.org/p/OT-2026-000002620/integrity",
    "signature_algorithm": "Ed25519",
    "signature_file": "manifest.sig",
    "verify_url": "https://opentechnical.org/integrity/verify"
  },
  "keywords": [
    "b25j18/00",
    "h01j37/32495",
    "h01j37/32495",
    "h01l21/68757",
    "h10p72/7616",
    "b25j19/00"
  ],
  "language": "en",
  "license": {
    "name": "Creative Commons Attribution 4.0 International",
    "url": "https://creativecommons.org/licenses/by/4.0/"
  },
  "publication_id": "OT-2026-000002620",
  "published_at": "2026-09-15T19:14:14.853738Z",
  "publisher": "Nebula Innovations Limited",
  "record_type": "record",
  "schema": "opentechnical-publication-manifest/1.0",
  "source_date": "2026-02-24",
  "source_id": "US-12564012-B2",
  "source_name": "the United States Patent and Trademark Office",
  "source_url": "https://patents.google.com/patent/US12564012B2",
  "supersedes": null,
  "title": "Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools",
  "uuid": "01a0a67d-c2c5-7f17-8076-c1ad42bc8d93"
}