---
publication_id: "OT-2026-000002620"
title: "Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools"
published_at: "2026-09-15T19:14:14.853738Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000002620"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j18/00"
  - "h01j37/32495"
  - "h01j37/32495"
  - "h01l21/68757"
  - "h10p72/7616"
  - "b25j19/00"
---

# Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

## Abstract

A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.