OPENTECHNICAL PUBLICATION
OT-2026-000002620

Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

Published: 2026-09-15T19:14:14.853738Z
Permanent URL: https://opentechnical.org/p/OT-2026-000002620
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A coated chamber component comprises a chamber component and a coating
deposited on a surface of the chamber component, the coating comprising an
electrically-dissipative material. The electrically-dissipative material is to
provide a dissipative path from the coating to a ground. The coating is
uniform, conformal, and has a thickness ranging from about 10 nm to about 900
nm.

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OpenTechnical publication OT-2026-000002620
Published 2026-09-15T19:14:14.853738Z
https://opentechnical.org/p/OT-2026-000002620