{
  "abstract": "A workpiece holding device includes a workpiece support surface and a blow suction unit. The workpiece support surface includes suction holes formed therein. A workpiece placed on the workpiece support surface is adsorbed by the suction holes. The blow suction unit includes an ionizer that ionizes gas (for example, air), a jet outlet that jets the gas toward the workpiece and a suction inlet. The gas blown onto and reflected off the workpiece is suctioned through the suction inlet. While blowing the ionized gas onto the workpiece, the blow suction unit is moved relative to the length direction of the workpiece.",
  "assignees": [
    "NHK SPRING CO LTD"
  ],
  "authors": [
    "FUKUSHIMA KOICHI",
    "HONMA AKIRA"
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  "source_date": "2026-02-17",
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  "title": "Workpiece holding device and inspection device comprising workpiece holding device",
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