{
  "abstract": "An end effector is described which is suitable for handling both wafers and wafer cassettes. The end effector has a first gripping unit configured to pick up and hold individual wafers and a second gripping unit configured to pick up and hold a wafer cassette, wherein the first and second gripping units are connected to each other in such a way that they can be attached to a common robot arm and that they are arranged at an angle to each other so that they do not interfere with each other during operation.",
  "assignees": [
    "CENTROTHERM INT AG"
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  "authors": [
    "PELZ PATRICK",
    "REIZE RALF",
    "SCHMID PATRICK"
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  "source_date": "2026-02-12",
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  "title": "End effector and robot having an end effector",
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