OPENTECHNICAL PUBLICATION
OT-2026-000002976

End effector and robot having an end effector

Published: 2026-09-15T19:16:30.630950Z
Permanent URL: https://opentechnical.org/p/OT-2026-000002976
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

An end effector is described which is suitable for handling both wafers and
wafer cassettes. The end effector has a first gripping unit configured to pick
up and hold individual wafers and a second gripping unit configured to pick up
and hold a wafer cassette, wherein the first and second gripping units are
connected to each other in such a way that they can be attached to a common
robot arm and that they are arranged at an angle to each other so that they do
not interfere with each other during operation.

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OpenTechnical publication OT-2026-000002976
Published 2026-09-15T19:16:30.630950Z
https://opentechnical.org/p/OT-2026-000002976