{
  "abstract": "The present inventive concept relates to a substrate transfer device that detects an abnormality of a plurality of end-effectors and a method for determining an abnormality of the substrate transfer device. The substrate transfer device includes: a plurality of end-effectors extending in a first direction and disposed in multi-stages in a second direction crossing the first direction to support substrates, respectively; an interval adjustment unit configured to adjust an interval between the plurality of end-effectors; and an abnormality detection unit configured to detect an abnormality of each of the plurality of end-effectors, wherein the plurality of end-effectors may include: a reference end-effector that is fixed in position; and a variable end-effector that is adjusted in distance from the reference end-effector with respect to the reference end-effector.",
  "assignees": [
    "EUGENE TECHNOLOGY CO LTD"
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  "authors": [
    "BAE HYEONG HWAN",
    "HYON JUN JIN",
    "KO HYEONG SIK",
    "MIN JUNG KI",
    "SONG BYOUNG GYU"
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  "source_id": "US-2026042225-A1",
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  "title": "Substrate transfer device and method for determining abnormality of substrate transfer device",
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