---
publication_id: "OT-2026-000003005"
title: "Substrate transfer device and method for determining abnormality of substrate transfer device"
published_at: "2026-09-15T19:16:41.896326Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003005"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j11/0095"
  - "b25j11/0095"
  - "b25j19/06"
  - "h10p72/3402"
  - "b25j11/00"
  - "b25j11/0095"
---

# Substrate transfer device and method for determining abnormality of substrate transfer device

## Abstract

The present inventive concept relates to a substrate transfer device that detects an abnormality of a plurality of end-effectors and a method for determining an abnormality of the substrate transfer device. The substrate transfer device includes: a plurality of end-effectors extending in a first direction and disposed in multi-stages in a second direction crossing the first direction to support substrates, respectively; an interval adjustment unit configured to adjust an interval between the plurality of end-effectors; and an abnormality detection unit configured to detect an abnormality of each of the plurality of end-effectors, wherein the plurality of end-effectors may include: a reference end-effector that is fixed in position; and a variable end-effector that is adjusted in distance from the reference end-effector with respect to the reference end-effector.