OPENTECHNICAL PUBLICATION
OT-2026-000003005

Substrate transfer device and method for determining abnormality of substrate transfer device

Published: 2026-09-15T19:16:41.896326Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003005
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

The present inventive concept relates to a substrate transfer device that
detects an abnormality of a plurality of end-effectors and a method for
determining an abnormality of the substrate transfer device. The substrate
transfer device includes: a plurality of end-effectors extending in a first
direction and disposed in multi-stages in a second direction crossing the
first direction to support substrates, respectively; an interval adjustment
unit configured to adjust an interval between the plurality of end-effectors;
and an abnormality detection unit configured to detect an abnormality of each
of the plurality of end-effectors, wherein the plurality of end-effectors may
include: a reference end-effector that is fixed in position; and a variable
end-effector that is adjusted in distance from the reference end-effector with
respect to the reference end-effector.

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OpenTechnical publication OT-2026-000003005
Published 2026-09-15T19:16:41.896326Z
https://opentechnical.org/p/OT-2026-000003005