{
  "abstract": "Disclosed is a substrate transfer apparatus disposed in a transfer chamber, the substrate transfer apparatus including: a robot main body having hands supporting a substrate; and a driving unit for moving the robot main body in a straight direction, wherein the driving unit includes: a driving case having an inner space; an actuator provided within the driving case, and connected to the robot main body; a cable veyor provided on one side of the actuator to guide the cable connected to the robot main body; an exhaust fan for exhausting atmosphere of the inner space; and an intake manifold for receiving suction force of the exhaust fan through a first intake path connected to the exhaust fan to intake a space where the cable veyor is located.",
  "assignees": [
    "SEMES CO LTD"
  ],
  "authors": [
    "CHO JU YEON",
    "KIM BYEONG KWAN",
    "KIM MIN WOO",
    "KIM MIN YOUNG",
    "LEE JOON HEE",
    "YU JAE SEUNG"
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  "supersedes": null,
  "title": "Substrate transfer apparatus and substrate processing system including the same",
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