---
publication_id: "OT-2026-000003008"
title: "Substrate transfer apparatus and substrate processing system including the same"
published_at: "2026-09-15T19:16:43.120466Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003008"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j11/0095"
  - "h01l21/67017"
  - "h10p72/0402"
  - "h10p72/3212"
  - "b25j11/00"
  - "b25j11/0095"
---

# Substrate transfer apparatus and substrate processing system including the same

## Abstract

Disclosed is a substrate transfer apparatus disposed in a transfer chamber, the substrate transfer apparatus including: a robot main body having hands supporting a substrate; and a driving unit for moving the robot main body in a straight direction, wherein the driving unit includes: a driving case having an inner space; an actuator provided within the driving case, and connected to the robot main body; a cable veyor provided on one side of the actuator to guide the cable connected to the robot main body; an exhaust fan for exhausting atmosphere of the inner space; and an intake manifold for receiving suction force of the exhaust fan through a first intake path connected to the exhaust fan to intake a space where the cable veyor is located.