OPENTECHNICAL PUBLICATION
OT-2026-000003008

Substrate transfer apparatus and substrate processing system including the same

Published: 2026-09-15T19:16:43.120466Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003008
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

Disclosed is a substrate transfer apparatus disposed in a transfer chamber,
the substrate transfer apparatus including: a robot main body having hands
supporting a substrate; and a driving unit for moving the robot main body in a
straight direction, wherein the driving unit includes: a driving case having
an inner space; an actuator provided within the driving case, and connected to
the robot main body; a cable veyor provided on one side of the actuator to
guide the cable connected to the robot main body; an exhaust fan for
exhausting atmosphere of the inner space; and an intake manifold for receiving
suction force of the exhaust fan through a first intake path connected to the
exhaust fan to intake a space where the cable veyor is located.

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OpenTechnical publication OT-2026-000003008
Published 2026-09-15T19:16:43.120466Z
https://opentechnical.org/p/OT-2026-000003008