OPENTECHNICAL PUBLICATION
OT-2026-000003180

Apparatus and method for automatically handling and holding panels near and at the exact plane of exposure

Published: 2026-09-15T19:44:54.568777Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003180
Categories: Tools & Tooling > Clamping Tools

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ABSTRACT

The present invention involves both an apparatus and a method for handling and
holding panels and other substrates for photolithographic exposures. In one of
its aspects, the present invention comprises bi-modal vacuum cup-bellows
devices which automatically retract behind (below) the surface of a chuck, and
to remain so retracted at all times except when it is desired to draw a panel
toward the chuck. The retraction eliminates interference with movements of the
panel during snubbing. In another of its aspects, the present invention
comprises registration (locator) pin mechanisms that incorporate bearings. The
bearings both turn and move axially, and operate to prevent the panel edges
from hanging thereon. In another of its aspects, the present invention
comprises a hand-off vacuum cup-bellows device that clamps onto each panel as
it comes from a robotic loader. Such device incorporates a lubricious cover
that prevents rolling of the cup edges and that facilitates sliding of each
panel during snubbing. The devices are such as not to prevent vacuum gripping
of the rear surface of the panel. In another of its aspects, the present
invention comprises a snubber cylinder and bar that applies light pressure
along a substantial length of the thin edge of each panel, and that is
constructed to reduce the chances that a panel edge will hang up on the bar.

1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

[0004] Sheet 4.

[0005] Sheet 5.

[0006] Sheet 6.

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OpenTechnical publication OT-2026-000003180
Published 2026-09-15T19:44:54.568777Z
https://opentechnical.org/p/OT-2026-000003180