---
publication_id: "OT-2026-000003187"
title: "Device for transporting substrates"
published_at: "2026-09-15T19:46:03.765118Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003187"
categories:
  - "tools-tooling/clamping-tools"
keywords:
  - "c23c14/50"
  - "c23c14/50"
  - "c23c14/56"
  - "c23c14/56"
  - "y10s414/121"
  - "y10s414/121"
---

# Device for transporting substrates

## Abstract

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

## 1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

[0004] Sheet 4.

[0005] Sheet 5.

[0006] Sheet 6.