OPENTECHNICAL PUBLICATION
OT-2026-000003187

Device for transporting substrates

Published: 2026-09-15T19:46:03.765118Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003187
Categories: Tools & Tooling > Clamping Tools

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ABSTRACT

Apparatus for transporting substrates to and from at least one device (1) for
holding substrates (2), the at least one device having a substrate support (5)
disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at
least one displaceably disposed gripper (75), which can be displaced by a
mechanical and/or electro-magnetically or magnetically operating positioning
device (130) between a substrate gripping position and a substrate release
position, and a centering device (157, 157', 161) for centering a
substrate relative to the substrate support in conjunction with transport of
the substrate by the apparatus to the substrate support.

1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

[0004] Sheet 4.

[0005] Sheet 5.

[0006] Sheet 6.

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OpenTechnical publication OT-2026-000003187
Published 2026-09-15T19:46:03.765118Z
https://opentechnical.org/p/OT-2026-000003187