{
  "abstract": "The present invention discloses a flexible vacuum pick-up device for use in wafer processing that includes a handle portion adapted for holding by a human hand, the handle portion has a passage therein for fluid communication, a flexible conduit for providing a connection between the handle portion and a pick-up head and for providing a vacuum passage therethrough, and a vacuum pick-up head that has an extended planar surface adapted for making intimate contact with a substantially flat wafer.",
  "assignees": [
    "TAIWAN SEMICONDUCTOR MFG"
  ],
  "authors": [
    "CHEN Y H",
    "LEE C H"
  ],
  "canonical_url": "https://opentechnical.org/p/OT-2026-000003219",
  "categories": [
    "robotics-automation/robot-architectures"
  ],
  "extent": {
    "figures": 0,
    "paragraphs": 1,
    "words": 81
  },
  "figures": [],
  "files": [
    {
      "bytes": 23282,
      "media_type": "image/webp",
      "name": "figures/fig-001-card.webp",
      "sha256": "79cab2e9304da01629d1cb3f582c35d1695ff04e7571a2d703756ffc9030925e"
    },
    {
      "bytes": 44946,
      "media_type": "image/webp",
      "name": "figures/fig-001-full.webp",
      "sha256": "06f0e1620d59a051a0cea28d43c68153311891fa900606c1e81ef3a3232be20f"
    },
    {
      "bytes": 7748,
      "media_type": "image/webp",
      "name": "figures/fig-001-thumb.webp",
      "sha256": "6f4687fff066536a8453c5d17a62ed5c5456236e0cfd1bd5e840b8b07df8bcbb"
    },
    {
      "bytes": 10338,
      "media_type": "text/html; charset=utf-8",
      "name": "index.html",
      "sha256": "bae85af5245787bf8c3376f870494f4574b0c941d2f7c5c036f63cc78fc47db4"
    },
    {
      "bytes": 936,
      "media_type": "text/markdown; charset=utf-8",
      "name": "publication.md",
      "sha256": "166537310681bd4a127b76e8f176362ef4e6497a1d0c71124d2ae33b9fbb4420"
    },
    {
      "bytes": 1050,
      "media_type": "text/plain; charset=utf-8",
      "name": "publication.txt",
      "sha256": "ef6a898bf312fbd965adf24321b6f2db176454b238ae03a3f440eecb71b8e5d5"
    }
  ],
  "integrity": {
    "hash_algorithm": "sha256",
    "keys_url": "https://opentechnical.org/integrity/keys",
    "record_url": "https://opentechnical.org/p/OT-2026-000003219/integrity",
    "signature_algorithm": "Ed25519",
    "signature_file": "manifest.sig",
    "verify_url": "https://opentechnical.org/integrity/verify"
  },
  "keywords": [
    "b25j1/02",
    "b25j1/02",
    "b25j1/02",
    "b25j15/06",
    "b25j15/0616",
    "b25j15/0616"
  ],
  "language": "en",
  "license": {
    "name": "Creative Commons Attribution 4.0 International",
    "url": "https://creativecommons.org/licenses/by/4.0/"
  },
  "publication_id": "OT-2026-000003219",
  "published_at": "2026-09-15T19:51:25.858801Z",
  "publisher": "Nebula Innovations Limited",
  "record_type": "figure_set",
  "schema": "opentechnical-publication-manifest/1.0",
  "source_date": "1998-05-05",
  "source_id": "US-5746462-A",
  "source_name": "the United States Patent and Trademark Office",
  "source_note": "drawings reproduced from the published facsimile",
  "source_url": "https://patents.google.com/patent/US5746462A",
  "supersedes": null,
  "title": "Flexible vacuum pick-up device",
  "uuid": "01a0a69f-cda2-7a2b-ad83-a7f7d837eb76"
}