---
publication_id: "OT-2026-000003219"
title: "Flexible vacuum pick-up device"
published_at: "2026-09-15T19:51:25.858801Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003219"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j1/02"
  - "b25j1/02"
  - "b25j1/02"
  - "b25j15/06"
  - "b25j15/0616"
  - "b25j15/0616"
---

# Flexible vacuum pick-up device

## Abstract

The present invention discloses a flexible vacuum pick-up device for use in wafer processing that includes a handle portion adapted for holding by a human hand, the handle portion has a passage therein for fluid communication, a flexible conduit for providing a connection between the handle portion and a pick-up head and for providing a vacuum passage therethrough, and a vacuum pick-up head that has an extended planar surface adapted for making intimate contact with a substantially flat wafer.

## 1. Drawings

[0001] Sheet 1.