OPENTECHNICAL PUBLICATION
OT-2026-000003219

Flexible vacuum pick-up device

Published: 2026-09-15T19:51:25.858801Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003219
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

The present invention discloses a flexible vacuum pick-up device for use in
wafer processing that includes a handle portion adapted for holding by a human
hand, the handle portion has a passage therein for fluid communication, a
flexible conduit for providing a connection between the handle portion and a
pick-up head and for providing a vacuum passage therethrough, and a vacuum
pick-up head that has an extended planar surface adapted for making intimate
contact with a substantially flat wafer.

1. Drawings

[0001] Sheet 1.

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OpenTechnical publication OT-2026-000003219
Published 2026-09-15T19:51:25.858801Z
https://opentechnical.org/p/OT-2026-000003219