---
publication_id: "OT-2026-000003245"
title: "Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers"
published_at: "2026-09-15T19:55:55.214942Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003245"
categories:
  - "sensors-controls-machine-vision/force-and-pressure-sensing"
keywords:
  - "g01l9/0075"
  - "g01l9/0042"
  - "g01l9/0073"
---

# Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers

## Abstract

Drawing sheets for capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers, reproduced from the published facsimile. The written description is in the original document, which is linked above.

## 1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.