OPENTECHNICAL PUBLICATION
OT-2026-000003245

Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers

Published: 2026-09-15T19:55:55.214942Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003245
Categories: Sensors, Controls & Machine Vision > Force and Pressure Sensing

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ABSTRACT

Drawing sheets for capacitive pressure transducer structure with a sealed
vacuum chamber formed by two bonded silicon wafers, reproduced from the
published facsimile. The written description is in the original document,
which is linked above.

1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

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OpenTechnical publication OT-2026-000003245
Published 2026-09-15T19:55:55.214942Z
https://opentechnical.org/p/OT-2026-000003245