---
publication_id: "OT-2026-000003362"
title: "Device for mounting and transporting substrates in vacuum apparatus"
published_at: "2026-09-15T20:16:09.364323Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003362"
categories:
  - "material-handling/conveying-systems"
keywords:
  - "b65g49/068"
  - "b65g49/068"
  - "b65g2249/02"
  - "b65g2249/02"
  - "b65g49/061"
  - "b65g49/061"
---

# Device for mounting and transporting substrates in vacuum apparatus

## Abstract

Device for mounting thin, preferably flat substrates (11, 11', . . . ) and for the transport of these substrates (11, 11'. . . ) in treatment apparatus, for example vacuum coating and etching apparatus, the device being formed by a frame (1), preferably in a rectangular shape, which is of such size that in the area surrounded by the frame (1) a support, e.g., a support formed of spoke-like round rods (6, 6', . . . ). can be inserted, and on this support fastening means for mounting the substrates (11, 11', . . . ) are provided, which hold the substrates (11, 11', . . . ) such that their substantially planar lateral surfaces run approximately parallel to the plane of the frame.

## 1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.