OPENTECHNICAL PUBLICATION
OT-2026-000003362

Device for mounting and transporting substrates in vacuum apparatus

Published: 2026-09-15T20:16:09.364323Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003362
Categories: Material Handling > Conveying Systems

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ABSTRACT

Device for mounting thin, preferably flat substrates (11, 11', . . . ) and
for the transport of these substrates (11, 11'. . . ) in treatment
apparatus, for example vacuum coating and etching apparatus, the device being
formed by a frame (1), preferably in a rectangular shape, which is of such
size that in the area surrounded by the frame (1) a support, e.g., a support
formed of spoke-like round rods (6, 6', . . . ). can be inserted, and on
this support fastening means for mounting the substrates (11, 11', . . . )
are provided, which hold the substrates (11, 11', . . . ) such that their
substantially planar lateral surfaces run approximately parallel to the plane
of the frame.

1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

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OpenTechnical publication OT-2026-000003362
Published 2026-09-15T20:16:09.364323Z
https://opentechnical.org/p/OT-2026-000003362