---
publication_id: "OT-2026-000003406"
title: "Wafer handling system with Bernoulli pick-up"
published_at: "2026-09-15T20:23:33.423996Z"
canonical_url: "https://opentechnical.org/p/OT-2026-000003406"
categories:
  - "robotics-automation/robot-architectures"
keywords:
  - "b25j15/0616"
  - "b25j15/0616"
  - "b25j15/06"
  - "b25j9/10"
  - "b25j9/107"
  - "b25j9/107"
---

# Wafer handling system with Bernoulli pick-up

## Abstract

Wafer handling apparatus operating under the Bernoulli principle to pick up, transport and deposit wafers, which apparatus includes a plate having a plurality of laterally oriented outlets and a central outlet for discharging gas in a pattern sufficient to develop a low pressure enviroment to pick up the wafer while bathing the wafer in radially outflowing gases to prevent intrusion and deposition on the wafer of particulate matter in suspension.

## 1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

[0004] Sheet 4.

[0005] Sheet 5.

[0006] Sheet 6.

[0007] Sheet 7.

[0008] Sheet 8.

[0009] Sheet 9.

[0010] Sheet 10.