OPENTECHNICAL PUBLICATION
OT-2026-000003406

Wafer handling system with Bernoulli pick-up

Published: 2026-09-15T20:23:33.423996Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003406
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

Wafer handling apparatus operating under the Bernoulli principle to pick up,
transport and deposit wafers, which apparatus includes a plate having a
plurality of laterally oriented outlets and a central outlet for discharging
gas in a pattern sufficient to develop a low pressure enviroment to pick up
the wafer while bathing the wafer in radially outflowing gases to prevent
intrusion and deposition on the wafer of particulate matter in suspension.

1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

[0004] Sheet 4.

[0005] Sheet 5.

[0006] Sheet 6.

[0007] Sheet 7.

[0008] Sheet 8.

[0009] Sheet 9.

[0010] Sheet 10.

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OpenTechnical publication OT-2026-000003406
Published 2026-09-15T20:23:33.423996Z
https://opentechnical.org/p/OT-2026-000003406