OPENTECHNICAL PUBLICATION
OT-2026-000003410

Non-contact conveying device

Published: 2026-09-15T20:24:10.629304Z
Permanent URL: https://opentechnical.org/p/OT-2026-000003410
Categories: Robotics & Automation > Robot Architectures

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ABSTRACT

A non-contact conveying device for lifting and/or supporting wafer-like
articles without physical contact with the articles. The device has a pickup
head with a cuhsion-vacuum room fully opened at its bottom and has an ejector
opening located at the center of its upper wall and communicating with the
cushion-vacuum room of the pickup head. The ejector opening is coupled to a
positive pressure gas supply. The pickup head has an operating surface at the
bottom of the side wall which is positioned adjacnet to an article to be
lifted. In the case of a wide clearance existing between the operating surface
and the article, the non-contact conveying device works as an ejector and the
pressure within the cushion-vacuum room is decreased since the cushion-vacuum
room acts in the manner of a vacuum room of an ejector and the space formed
between the operating surface and the article acts in the manner of a diffuser
of an ejector. In the case of a small clearance existing between the
cushion-vacuum room and the article, the non-contact conveying device operates
like a hovercraft and the pressure with the cushion-vacuum room increases,
since the cushion-vacuum room acts in manner of a pressure room of a
hovercraft.

1. Drawings

[0001] Sheet 1.

[0002] Sheet 2.

[0003] Sheet 3.

[0004] Sheet 4.

[0005] Sheet 5.

[0006] Sheet 6.

[0007] Sheet 7.

[0008] Sheet 8.

[0009] Sheet 9.

[0010] Sheet 10.

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OpenTechnical publication OT-2026-000003410
Published 2026-09-15T20:24:10.629304Z
https://opentechnical.org/p/OT-2026-000003410