Abstract
A method includes: installing a square calibration master on a table, and measuring each of measurement surfaces A, B, and C of the square calibration master by a position measurement sensor attached to a main spindle; calculating a first squareness between the measurement surfaces A and B; calculating a second squareness between the measurement surfaces A and C; calculating a difference between the first squareness and the second squareness; comparing the difference with a preliminarily set difference threshold value; calculating an average value of the first squareness and the second squareness when the difference is equal to or less than the difference threshold value, and calculating a corrected squareness based on an angular deviation and the first squareness or the second squareness when the difference exceeds the difference threshold value; and setting the compensation parameter based on the average value or the corrected squareness.