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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12605748-B2, on 21 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000228

Liquid chemical tank module and liquid chemical supply apparatus including the same

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Classification
Manufacturing & Assembly Equipment › Surface Treatment
Original source
US-12605748-B2, the United States Patent and Trademark Office, 21 April 2026
Document SHA-256
6168db8f82fc6e03615d527635a5989a582a16f9a37ed593fd964bbf429ffcb4

Abstract

Provided are a liquid chemical tank module and a liquid chemical supply apparatus, the liquid chemical tank module including a tank body having a storage space capable of storing a liquid chemical, a gas ejector for ejecting an inert gas into the liquid chemical to reduce dissolved oxygen in the liquid chemical of the tank body, and a controller for applying a control signal to the gas ejector to control a flow rate of the inert gas, wherein the gas ejector includes a gas pipe extending into the storage space and at least partially dipped in the liquid chemical to supply the inert gas from outside of the tank body into the storage space, and a plurality of ejection nozzles along the extension direction of the gas pipe to eject the inert gas into the storage space or the liquid chemical in the storage space.

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Citation

OpenTechnical Publication OT-2026-000000228, “Liquid chemical tank module and liquid chemical supply apparatus including the same,” published September 15, 2026 at 19:02:38 UTC, https://opentechnical.org/p/OT-2026-000000228.

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