Abstract
A force sensor includes an array substrate having a first surface provided with a plurality of array electrodes, a counter substrate having an opposite surface facing the first surface, a guard electrode disposed on the first surface and extending between the array electrodes, a sensor layer made of a conductive elastomer and placed over the first surface, the array electrodes, and the guard electrode, and a common electrode provided on the opposite surface. The array substrate and the guard electrode are equipotential.