Abstract
The invention relates to a method for determining an orientation of a sample on a sample stage that is rotatable about an axis of rotation. The method comprises: a) positioning the sample relatively at a first position; b) rotating the sample through a first rotary angle relative to a height sensor; and c) repeatedly measuring first heights of the sample using the height sensor during the rotation. In the process, steps a) to c) are furthermore performed for at least one second position for the purpose of measuring second heights.