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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12598941-B2, on 7 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001133

Apparatus for processing substrate, device of controlling apparatus for processing substrate, method of controlling apparatus for processing substrate, and storage medium that stores program

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Classification
Material Handling › Conveying Systems
Inventors
KAGAYA SHUNSUKE
Assignee
EBARA CORP
Original source
US-12598941-B2, the United States Patent and Trademark Office, 7 April 2026
Document SHA-256
e73dab69ed3ef7037125d88a87c06e5553b665829a29cff835f06d4fa1911f25

Abstract

One object of the present disclosure is to flexibly and promptly save a processing solution in an apparatus for processing a substrate. An apparatus for processing a substrate is configured to change over a transfer time table between an ordinary mode that has a maximum throughput of the apparatus for processing the substrate and a processing solution saving mode that saves a processing solution in at least one of processing tanks. The apparatus for processing the substrate determines whether or not the apparatus for processing the substrate is in a slack period that has a small demand output by the apparatus for processing the substrate, based on a rate-controlling point that limits a processing speed of the entire apparatus for processing the substrate, and sets the transfer time table to the processing solution saving mode when it is determined that the apparatus for processing the substrate is in the slack period, while setting the transfer time table to the ordinary mode when it is determined that the apparatus for processing the substrate is not in the slack period.

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Citation

OpenTechnical Publication OT-2026-000001133, “Apparatus for processing substrate, device of controlling apparatus for processing substrate, method of controlling apparatus for processing substrate, and storage medium that stores program,” published September 15, 2026 at 19:03:54 UTC, https://opentechnical.org/p/OT-2026-000001133.

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