OpenTechnical
This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12576538-B2, on 17 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001816

Photoresist bottle replacement system

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
Chen yu kai, CHIU HUEI-CHI, WANG SHI-MING, WU LI-JEN, YANG SHARON, YU OLIVER
Assignee
TAIWAN SEMICONDUCTOR MFG CO LTD
Original source
US-12576538-B2, the United States Patent and Trademark Office, 17 March 2026
Document SHA-256
79d2eea60cfb854795f34b878bf81ed757a5e97ea94e4051ba195fe2f56ea17c

Abstract

The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000001816, “Photoresist bottle replacement system,” published September 15, 2026 at 19:08:50 UTC, https://opentechnical.org/p/OT-2026-000001816.

To cite specific content, add the paragraph or figure numbers.

Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.