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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12569981-B2, on 10 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000002087

Substrate processing apparatus

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
NEMOTO SHUHEI
Assignee
SCREEN HOLDINGS CO LTD
Original source
US-12569981-B2, the United States Patent and Trademark Office, 10 March 2026
Document SHA-256
9a0c85013619d99e521c1cc78dc559a62fa97bcfc8d798a507d8e9d83def361a

Abstract

In an substrate processing apparatus according to the present invention, a chamber has a conveyance opening for conveying the substrate along a conveyance path between the outside of the chamber and the substrate holder and a maintenance opening provided on an opposite side of the conveyance opening with the substrate holder. A rotating mechanism has a motor for generating a rotational driving force to rotate the substrate holder and a power transmitter for transmitting the rotational driving force generated by the motor to the substrate holder. The motor and the power transmitter are so arranged on the opposite side of the conveyance opening with respect to the substrate holder, as to face the maintenance opening, to thereby make the rotating mechanism accessible through the maintenance opening from the outside.

Publication information

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Citation

OpenTechnical Publication OT-2026-000002087, “Substrate processing apparatus,” published September 15, 2026 at 19:10:43 UTC, https://opentechnical.org/p/OT-2026-000002087.

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