Abstract
An aperture plate ( 1 ) is attached at its rim ( 203 ) to a support washer ( 3 ) by adhesive. Anchor grooves ( 204 ) having a zig-zag pattern in plan are machined in the lower surface of the rim ( 203 of the aperture plate before application of the adhesive. The grooves ( 204 ) extend out to the edge of the aperture plate ( 1 ). The anchor grooves have a depth in the range of 10 μm to 40 μm, and a width in the range of 20 μm to 150 μm, and an angular pitch in the range of 2.5° to 12.5°. Excellent bonding strength is achieved for long term reliable attachment in an environment of high frequency vibration and moisture and chemical corrosion.