Abstract
The present invention relates to a valve module for a vacuum pump, and the valve module includes a through-body (11) mounted on a communication-hole (113) of the vacuum pump, and a valve (13) disposed in the body (11) to open and close a central passage (12) while moving upward/downward. In the present invention, particularly, an exhaust path (17) of a pad (120) includes one or more longitudinal air guide-grooves (18), which are defined in an inner wall (15a) or an outer wall (13a) and are disposed between the inner wall (15a) of a space part (15) and the outer wall (13a) of the valve (13) to serve as an air passage connected to the passage (12), and a gap or micro-hole (20) defined between the valve (13) and the body (11) to communicate with the guide-groove and the central passage (12). Therefore, there is no concern that the passage is blocked or deformed even though the body (11) is made of an elastically deformable material.