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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2001020763-A1, on 13 September 2001. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003096

Chuck and suction board for plates

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
TOKUNAGA HARUO
Assignee
KURAITEKKU CO LTD
Original source
US-2001020763-A1, the United States Patent and Trademark Office, 13 September 2001
Document SHA-256
a03199d16b09b8bb6aae82bb786ffd370601f4a9ff52b3021cd0d97942002c9c

An apparatus for transferring a plate member such as a wafer by supporting the plate member with a plurality of support pins, and vacuum-sucking the plate member with a suction disk without allowing the suction disk to make contact with the plate member. Vacuum generated in a space between the plate member ( 51 ) and the suction disk ( 8 ) is introduced into a space between a hollow resilient body ( 3 ) via a conduit ( 11 ) formed in a lever ( 9 ), to drive the suction disk by expansion/contraction of the hollow resilient body, to attract the plate member without allowing the suction disk to make contact with the plate member, and to hold the plate member on the support pins ( 5 ). The suction disk has an outer ring area ( 49 ) on a suction surface (S) having at least one continuous groove surrounding the inner area of the suction disk. Vacuum is introduced into the inside of the suction surface (S) to suck the plate member.

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Abstract

An apparatus for transferring a plate member such as a wafer by supporting the plate member with a plurality of support pins, and vacuum-sucking the plate member with a suction disk without allowing the suction disk to make contact with the plate member. Vacuum generated in a space between the plate member ( 51 ) and the suction disk ( 8 ) is introduced into a space between a hollow resilient body ( 3 ) via a conduit ( 11 ) formed in a lever ( 9 ), to drive the suction disk by expansion/contraction of the hollow resilient body, to attract the plate member without allowing the suction disk to make contact with the plate member, and to hold the plate member on the support pins ( 5 ). The suction disk has an outer ring area ( 49 ) on a suction surface (S) having at least one continuous groove surrounding the inner area of the suction disk. Vacuum is introduced into the inside of the suction surface (S) to suck the plate member.

1. Drawings

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Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000003096, “Chuck and suction board for plates,” published September 15, 2026 at 19:28:12 UTC, https://opentechnical.org/p/OT-2026-000003096.

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Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.