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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-6072157-A, on 6 June 2000. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003153

Thermophoretic vacuum wand

Published
Permanent URL
Classification
Material Handling › Conveying Systems
Inventors
KLEBANOFF LEONARD ELLIOTT, RADER DANIEL JOHN
Assignee
EUV LLC
Original source
US-6072157-A, the United States Patent and Trademark Office, 6 June 2000
Document SHA-256
e074db48f96653700329ddbb9ded14591e7d12fde02fe60fb6d8d0a5aa1fa2b6

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

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Abstract

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

1. Drawings

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[0002]Sheet 2.

Publication information

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Citation

OpenTechnical Publication OT-2026-000003153, “Thermophoretic vacuum wand,” published September 15, 2026 at 19:39:41 UTC, https://opentechnical.org/p/OT-2026-000003153.

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