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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-5324087-A, on 28 June 1994. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003344

Sucked substrate detecting apparatus

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
IKEDA JIRO, SHIMOSE YUICHIRO
Assignee
SHIBAURA ENG WORKS LTD, SONY CORP
Original source
US-5324087-A, the United States Patent and Trademark Office, 28 June 1994
Document SHA-256
f8b68914a6d7617770bb973a00b80305e100a09c6a8f4276648af69e6e24a30c

A sucked substrate detecting apparatus is provided which comprises sucking pads for sucking disk substrates, a main pipe connected to the sucking pads, a vacuum pump connected through a first valve to the main pipe, first and second branch pipes connected respectively to the main pipe, a second valve connected to the first branch pipe, for opening and closing with respect to the atmosphere, a pressure sensor connected to the second branch pipe, for substantially detecting the pressure in the main pipe, and a controller connected to the first and second valves. The sucked substrate detecting apparatus can judge on the basis of the output levels produced from the pressure sensor, the presence or absence of a disk substrate sucked by the sucking pads and whether or not the disk substrate has been satisfactorily sucked by the sucking pads.

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Abstract

A sucked substrate detecting apparatus is provided which comprises sucking pads for sucking disk substrates, a main pipe connected to the sucking pads, a vacuum pump connected through a first valve to the main pipe, first and second branch pipes connected respectively to the main pipe, a second valve connected to the first branch pipe, for opening and closing with respect to the atmosphere, a pressure sensor connected to the second branch pipe, for substantially detecting the pressure in the main pipe, and a controller connected to the first and second valves. The sucked substrate detecting apparatus can judge on the basis of the output levels produced from the pressure sensor, the presence or absence of a disk substrate sucked by the sucking pads and whether or not the disk substrate has been satisfactorily sucked by the sucking pads.

1. Drawings

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[0002]Sheet 2.

Publication information

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Citation

OpenTechnical Publication OT-2026-000003344, “Sucked substrate detecting apparatus,” published September 15, 2026 at 20:13:05 UTC, https://opentechnical.org/p/OT-2026-000003344.

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