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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12605750-B2, on 21 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000076

Charging system and method for controlling charging system

Published
Permanent URL
Classification
Manufacturing & Assembly Equipment › Surface Treatment
Original source
US-12605750-B2, the United States Patent and Trademark Office, 21 April 2026
Document SHA-256
fbcc131de0c7ae980ce206e6f0fd0945b1a7318a10b5fb83f78d30af3ae6f592

Abstract

A charging system according to this disclosure includes a particle absorption tool configured to be electrostatically charged so as to build up a static electric charge for absorbing particles; a charger configured to electrostatically charge the particle absorption tool so as to build up the static electric charge; and a charger container configured to accommodate the charger, arranged in a place where a FOUP for accommodating substrates is arranged, and having an opening that is opened toward an interior of a substrate conveyor.

Publication information

Citation

OpenTechnical Publication OT-2026-000000076, “Charging system and method for controlling charging system,” published September 15, 2026 at 19:02:27 UTC, https://opentechnical.org/p/OT-2026-000000076.

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Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.