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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12607444-B2, on 21 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000119

Apparatus and methods for verifying alignment between a shadow ring and a substrate

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Classification
Sensors, Controls & Machine Vision › Position and Presence Sensing
Original source
US-12607444-B2, the United States Patent and Trademark Office, 21 April 2026
Document SHA-256
de7bfd006aca9225f0edd87559959def8f086f9adb189d0cabe55cf47bd7c97e

Abstract

Methods and apparatus for verifying alignment between an opaque shadow ring and a substrate are provided. In some embodiments, the apparatus includes a tool comprising: a transparent ring having an inner edge defining a central opening and an outer edge and having a top side and a bottom side; a gauge mark on or in the transparent ring spaced between the inner edge and the outer edge, the gauge mark extending around the inner edge; and a pin extending from the bottom side of the transparent ring and located between the gauge mark and the outer edge.

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Citation

OpenTechnical Publication OT-2026-000000119, “Apparatus and methods for verifying alignment between a shadow ring and a substrate,” published September 15, 2026 at 19:02:30 UTC, https://opentechnical.org/p/OT-2026-000000119.

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